Localization Progress of Equipment Parts: Ceramic Heaters and Electrostatic Chucks
As semiconductor manufacturing becomes more strategically important and supply chains more scrutinized, attention is shifting from headline tools—like lithography scanners and etchers—to the critical parts inside these systems. Among the most important of these parts are ceramic heaters and electrostatic chucks, which play central roles in thermal management and wafer handling in front‑end processes. Their localization, meaning the development and production of these parts within domestic or regional ecosystems rather than relying entirely on imports, is now a key topic for both equipment vendors and fabs.